MEMS器件常用微弱信号检测技术研究

Research of Detect Technology of Common Weak Signal in MEMS Devices

文章针对微机械(MEMS)器件中常用的微弱信号检测技术进行了简单的介绍。针对MEMS器件中微弱信号检测所使用的理论方法进行了总结分析,并提出了一些典型、实用的MEMS微弱信号检测电路。

This paper is mainly about the weak signal detection technology of the MEMS devices. Considering the principles and characteristics of the weak signals, the paper analyzes the method and theory of detecting the weak signal. Some typical MEMS weak signal detection circuits are also introduced in this paper.