摘要
氮化铝(AlN)是非氧化性高功能陶瓷材料,具有许多优异的物理化学性质,日益被人们所重视。评述了AlN粉末和AlN薄膜的制备,应用。
AlN is non-oxiding and high function ceramic with some champion physico-chemical properties. In this paper, various preparing techniques and applications of AlN powder and AlN films are reviewed.
出处
《材料导报》
EI
CAS
CSCD
北大核心
1998年第6期41-44,共4页
Materials Reports