金刚石薄膜断裂强度及形貌分析

Analysis on the Fracture Strength and Morphology of the Diamond Film

金刚石薄膜以其优异的性能成为许多行业不可或缺的功能材料,但因金刚石薄膜制备质量差、不稳定,导致金刚石薄膜力学性能的研究一直处于探索阶段,没有得出系统全面的结论。本文利用金刚石力学试验机对自支撑金刚石薄膜断裂强度与薄膜沉积厚度、抛光与否之间的关系进行了研究,利用扫描电子显微镜SEM对金刚石薄膜的表面和断口形貌进行了分析。研究表明,自支撑金刚石薄膜断裂主要是解离断裂,且其断裂强度随着沉积厚度的增加而减低,自支撑金刚石薄膜是否经过抛光对其断裂强度的大小有显著影响。

Diamond film was essential to many materials industries as function material because of its excellent properties, but the quality of prepared diamond films is poor and unstable, which has resulted in the research of mechanical properties of diamond film stayed at the exploratory stage, and no comprehensive and systematic conclusions were achieved. The relationship between the fracture strength of self-supporting diamond films, the diamond film deposition thickness and whether polishing press or not were studied by using the self-made mechanical testing machine. The surface and fracture morphology of the diamond film were analyzed by SEM. Results show that the main fracture of the self-supporting diamond film is the dissociation fracture, and the fracture strength of the self-supporting diamond film decreases with the deposition thickness increasing. The polishing press or not has very significant effect on the fracture strength.