基于激光干涉仪的测量机几何误差检定技术

Method of Geometric Error Detection for Measuring Machine Based on Laser Interferometer

误差补偿技术是提高测量机精度的一项重要技术,其内容包括误差模型的建立、误差检定和误差补偿。针对一种特定结构形式的测量机建立其包含13项原始几何误差的误差补偿数学模型,提出基于激光干涉仪的,针对包括定位误差、直线度运动误差、角运动误差和垂直度误差在内的测量机各单项几何误差的检定方法,并通过数学模型对测量机的测量误差作补偿,由此生成的误差检定模块还可以嵌入到测量机软件中,实现对测量机几何误差的快速检定和反复检定。试验表明,经误差补偿,测量机单轴在176mm测量范围内的最大测量误差由补偿前的0.1399mm减小为0.0017mm。利用该方法检定测量机的几何误差并作误差补偿能够有效地提高测量机精度。

Error compensation is an important technology to improve the precision of measuring machines.It includes the establishment of error model,error detection and error compensation.According to measuring machines with a sort of special structure,a method of geometric error detection based on laser interferometer is proposed.Mathematical model including 13 original geometric errors is established for error compensation.Each single geometric error including position error,linear motion error,angular motion error and perpendicularity error is detected respectively.Error detection module using this method can also be embedded in measuring software to achieve rapid and repeatable error detections.Results of experiment show that the measurement error of single axis can be reduced from 0.1399 mm to 0.0017 mm within the measuring range of 176 mm after error compensation.It is proved that the novel method is an effective way to improve precision of measuring machines.