用补偿器测量非球面的研究

Study of Testing Aspheric Surface with Null Corrector

重点讨论用零补偿器测量光学非球面表面面形精度的方法，并通过补偿器的光学设计，具体分析了各参数要素对测量精度的影响，最后给出在非球面数控加工不同阶段中对直径５００ｍｍ，ｆ／２的双曲面主镜的检测结果。

In this paper,the testing technique of figure accuracy for optics aspheric surface with null corrector is introduced.We presente the optical design of corrector and analyze influence of different paramters on testing accuracy.Finally,the testing results for a 500 mm diam.f/2 hyperbolic primary mirror in different stages of computer controlled aspheric surface fabrication are given.