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Ar/N_2流量比对辉光等离子渗镀TiN的影响 被引量:4

Effect of flow ratio of Ar/N_2 on TiN coatings prepared by double glow plasma surface alloying process
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摘要 利用双层辉光等离子渗金属技术,在碳钢表面合成TiN,研究不同的Ar/N2流量比对合成的TiN的影响,获得Ar/N2流量比与TiN表面硬度、表面颜色及TiN成分含量之间的关系,以及Ar/N2流量比对TiN相结构的影响结果:当Ar/N2流量比较大时,以{100}择优取向生长;随着Ar/N2的降低,TiN薄膜由{100}择优取向生长向{111}择优取向生长过渡;TiN薄膜中并不一定是单一的TiN相,还有其他如Ti2N相的存在,造成TiN薄膜硬度的降低。 TiN coatings formed on the surface of a plain carbon steel were prepared by using double glow plasma surface alloying technique.The effects of Ar /N2 gas flow ratio on formation of TiN and the phase structure of TiN,the relationship between Ar /N2 gas flow ratio and the surface hardness,color and TiN content in the TiN coatings were studied.The results show that the crystallographic preferential growth direction of TiN is {100} at higher ratio of Ar /N2 gas flow.As the Ar /N2 gas flow ratio decreases,the crystallographic preferential growth direction {100} changes into direction {111}.The Ti2 N phase exists in the TiN film,which decreases the hardness of TiN film.
出处 《材料热处理学报》 EI CAS CSCD 北大核心 2010年第7期119-122,共4页 Transactions of Materials and Heat Treatment
基金 国家自然科学基金(50764002) 信息材料广西重点实验室主任研究课题(桂科能0710908-06-Z) 2009年广西研究生科研创新项目(2009105950805M37)
关键词 双层辉光 择优取向 TIN薄膜 相结构 double glow preferred orientation TiN films phase structure
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