摘要
激光光功率控制对激光加工技术极为重要,本文介绍了在激光直写系统中用于光功率控制的声光调制器件并根据光强稳定度要求分析结出了调制器的结构参数和相关的控制电路。接控制原理及调制器参数设计并实现的声光调制系统获得了好的光强控制效果。受控前He-Cd激光器输出光强稳定度为15%,控制后一级衍射光光强稳定度达0.2‰。
It is important to control the laser power for laser manufacturing technique. Here we describes the applicatlon of acoustooptlc modulator to control the laser power in Laser Dlrect Writting Systern (LDWS) and analyses the structure parameters and c0rresponding control circuits for the modulator used in the system. The a coustooptic modulation system whlch was designed according to the control theory and the modulator parameters has good results in stabilizing the output power. The ratio of the He-Cd laser output nolse to total output power is 15% before controlling. The first order diffraction light power is stabllized to the degree of 0. 2%, by the acoustooptic device.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1999年第2期145-147,159,共4页
Chinese Journal of Scientific Instrument