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同步辐射储存环用国产溅射离子泵的发展方向 被引量:3

Development Direction of SIP Made in China for Storage Ring
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摘要 根据真空系统运行条件,参考国内外SIP,拟订了同步辐射储存环用国产SIP的性能指标。结合SIP的机理和国际测试标准,对指标作了分析说明,以期加深国内真空泵厂对改进SIP必要性的认识,统一厂方和用户对指标的理解,在真空界推行公正的竞争,促进国产SIP质量的提高和走向国际市场。 The performance parameters of SIP made in China for SR storage ring are made according the practical operation conditions of the vacuum system. The parameters are explained combined the mechanism of SIP with the international measurement standard for SIP.Deepening the vacuum factory's realizations for the parameters of SIP and for the necessity of modifying SIP, introducing the open and fair competitions in the vacuum field in China, improving the qualities of SIP made in China and prompting their export are our purposes.
出处 《真空科学与技术》 CSCD 北大核心 1999年第4期312-320,共9页 Vacuum Science and Technology
关键词 溅射离子泵 性能指标 同步辐射 储存环 Sputtering ion pump, Performance parameter, Explanation
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