摘要
A laser ion source (LIS) has several advantages over the conventional ion implanters. For example, LIS can produce up to two orders of magnitude higher current densities, higher charges, and very good pulsed beam. And modern lasers can ionize any solid material. Another advantage is the greater ease of biasing the ion source to positive high voltage, which is important for moving substrates. For these reason, we have custom-tailored a Nd :YAG laser with Q switch (Fig. 1). The laser system has been optimized for laser ion source experiment.
A laser ion source （LIS） has several advantages over the conventional ion implanters. For example, LIS can produce up to two orders of magnitude higher current densities, higher charges, and very good pulsed beam. And modern lasers can ionize any solid material. Another advantage is the greater ease of biasing the ion source to positive high voltage, which is important for moving substrates. For these reason, we have custom-tailored a Nd ：YAG laser with Q switch （Fig. 1）. The laser system has been optimized for laser ion source experiment.
