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在以Cu/Re镀膜为过渡层的铁衬底上沉积金刚石膜 被引量:6

Deposition of Diamond Films on the Iron Substrate by the Cu/Re Intermediate Layer
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摘要 本文采用热丝 C V D 法在以 Cu/ Re 镀膜为过渡层的铁衬底上沉积金刚石薄膜,研究了以 Re 作为铁衬底上沉积金刚石膜的过渡层的制备工艺及其对沉积金刚石膜的影响。实验结果表明:在铁衬底上难以直接镀上铼膜,但在铜上镀铼比铁衬底上镀铼要容易得多,且镀铼层质量好。以 Cu/ Re复合膜为过渡层,以巴基管为成核剂可以在铁衬底上沉积出质量很好的金刚石膜。 The procedure and technology of Re as interlayer for depositing diamond film on the ferrous alloys substrate were studied by using hot filament chemical vapor deposition(CVD).The results show that using interlayer of Re coating on the ferrous alloys substrate the diamond film with good quality could be deposited.In the same condition,it is easier to plate Re layer on Cu substrate than on the ferrous alloys.In the experiments a Cu layer was at first plated on the ferrous alloys as the substrate for depositing the Re layer,on which the Re layer would be deposited.On such Cu/Re multilayer on the ferrous alloys substrate and with the nucleation agent of buckytubes the diamond film with high quality could be deposited.
机构地区 清华大学机械系
出处 《人工晶体学报》 EI CAS CSCD 北大核心 1999年第3期271-274,共4页 Journal of Synthetic Crystals
关键词 金刚石膜 化学气相沉积 衬底 镀膜 镀铜 镀铼 diamond film,buckytube,chemical vapor deposition,rhenium
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