期刊文献+

气相合成金刚石薄膜的成核习性研究

Research on the Nucleation Formation of Vapor deposition Diamond Film
下载PDF
导出
摘要 本文采用燃烧焰法观察金刚石薄膜的成核生长过程。分析了衬底表面刻划及油污处理等因素对金刚石成核的影响。观察到成核初期的金刚石不具有明显晶形,含有较高的石墨相。 X R D 谱表明:成核初期衬底表面形成非金刚石结构的过渡层。并提出了控制成核密度提高沉积质量的思想。 The process of nuclei formation of diamond film was observed with flame combustion.The effects of substrate cutting and oil covering on the nuclei formation were determined and discussed.Diamond film formed during the first stage possesses an amorphous morphology richedr in graphite,which is determined to be a transition lager of non diamond structure by XRD spectrum.An ideal was proposed that the quality of vapor deposition diamond films could improved by controlling nucleation density.
作者 张伟 高军
出处 《人工晶体学报》 EI CAS CSCD 北大核心 1999年第3期275-278,共4页 Journal of Synthetic Crystals
关键词 化学气相沉积法 燃烧焰 金刚石薄膜 成核 CVD methoed,combustion flame,diamond films,nucleation
  • 引文网络
  • 相关文献

参考文献6

二级参考文献3

共引文献8

;
使用帮助 返回顶部