摘要
为了保证透镜的面形精度受温度影响较小,透镜采用低应力胶粘结要优于采用机械方式装夹。首先对比了胶粘结透镜在16℃,20℃,26℃时透镜轴向应力大小和面形的变化。实验验证了在不同温度下,胶粘结透镜面形的峰谷(PV)值(0.073λ,0.064λ,0.085λ)要优于机械方式装夹的透镜面形PV值(0.204λ,0.108λ,0.105λ)。最后对不同温度下胶粘结透镜面形变化的理论计算、仿真和实验结果的误差进行了分析。实验结果表明在温度变化时,采用胶粘结透镜的面形精度要优于机械装夹的透镜面形精度,并且能有效控制温度变化对透镜面形精度的影响。
In order to reduce the lens surface deformation when the temperature changes, the bonded lens can achieve better effect than the lens which is mounted by spacer and retainer. The radial stress of the bonded lens and surface deformation at 16 ℃, 20 ℃ and 26 ℃ are compared by theoretical calculation and simulation. Experiment is then made to prove that the surface deformation (PV value) of the bonded lens (0. 073λ, 0. 064λ, 0. 085λ) is better than the mounted lens (0. 204λ, 0. 108λ, 0. 105λ) at different temperatures. Finally, the error sources of the surface deformation about theoretical calculation, simulation and experiment at different temperatures are analyzed. Experimental results indicate that the surface accuracy of bonded lens is better than that of the mounted lens, and the bonded lens has less surface deformation when the temperature changes.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2011年第8期201-206,共6页
Chinese Journal of Lasers
基金
国家重大专项基金(2009ZX02205)资助课题
关键词
光学测量
面形精度
胶粘结透镜
温度变化
optical measurement
surface precision
bonded lens
temperature change