ESD发生器开路电压和电流波形校准方法探讨

Discussion on Methods for Calibration of Voltage and Current Waveform of ESD Generator

许多标准对系统级静电放电发生器的静电放电电流波形的校准设备和方法都有详细的要求,使得静电放电电流波形的校准有据可依,但国内外新老标准的要求不同,也会产生较大的误差。对于静电放电发生器的"开路电压",所有标准中都有准确度的要求,但没有对设备和方法进行规定。而不同的校准方法,其测试结果的偏差很大。系统地分析了静电放电发生器"开路电压"和放电电流波形的校准方法。

ESD current calibrate methods of system level ESD generator described in many standards,especially in old and updating versions,are different,which could cause distinctive calibration results.The calibration of ＂open circuit voltage＂ is required by several standards,however,there are no provisions on measurement equipments and testing methods.Therefore,as a key factor of calibration,various testing methods could bring large deviation of test result.Based on the consideration above,several methods for the voltage verification for ESD generator are analyzed.