静电力平衡式微型硅加速度计方案分析

Analysis on the Schemes of Electrostatically Force-Balanced Micro Silicon Accelerometer

静电力平衡式微型硅加速度计是一种新型加速度计。本文对这种加速度计的３种典型方案进行了分析，导出静电力（力矩）、静电力平衡回路刚度（角刚度）及加速度测量范围的表达式。有关结果可为这种加速度计参数设计提供理论依据。

Electrostatically force-balanced Micro silicon acceleromter is a new type of accelerometer. Three kinds of typical .schemes of this type of accelerometer are analyzed in this paper. The formulae of electrostatic force(torque), stiffness(angular stiffness ) of electrostatic force balance circuit, measurement range of acceleration are presented. The results presented in this paper can be used as the basis on designing the accelerometer parameters.