摘要
单晶衬底上外延生长金刚石薄膜一直是 VCD金刚石技术领域的重要研究方向之一 ,近年来这方面的研究取得了长足的进步。回顾了金刚石取向膜的研究史 ,介绍了提高金刚石膜取向度的方法和目前对金刚石取向膜生长过程、生长机理研究取得的进展及金刚石取向膜具有独特优异性能的实验研究。
Heteroepitaxy growth of diamond films on single crystal substrates is one of the important research directions in the CVD diamond films field. Recently much progress has been made on the subject. In this paper, the history of oriented diamond films research has been recalled, and the methods of improving orientation degree are introduced. New advance in growth process and mechanisms of oriented diamond films is described. It is found that oriented diamond film has unique excellent quality.
出处
《材料保护》
CAS
CSCD
北大核心
2000年第1期95-97,共3页
Materials Protection