硅微传感器的热挠曲及谐振频率的计算

Analysis and Calculation on Thermally Excited Deflection and Resonant Frequency of Micromachinced Silicon Resonant Sensors

分析了硅微机械谐振式传感器在热激励下的挠曲及谐振频率变化 ,建立了相应的数学模型 ,并对热挠曲灵敏度进行了优化设计。同时通过算例和测试数据的对比 ,验证了谐振频率计算模型的正确性。

Analysis is made on thermally excited deflection and resonant frequency of the micromachined silicon resonant sensors .Based on the theoretical model , the design is optimized for the deflection and the model of the resonant frequency is demonstrated by the experimental results.