摘要
共焦显微术在生物学及工程应用中已成为一种有效的测量、观察方法.本文针对共 焦显微三维测量系统提出了一种高精度快速算法,并进行了误差分析与计算机仿真.对实际 共焦三维测量系统的设计具有重要意义.
Confocal microscopy has been an important tool for measurement and inspection in the fields of biomedicine and engineering since its appearance. To get high measurement precision, high number aperture (NA) is often used. However,it's also mean the axial sampling distance is small,and many times sampling is needed to get the profile of object. In this paper,an interpolation technique is studied, and a fast method to get the 3D profile is inferred. With this method, high measurement precision can be gotten,while the axial sampling distance is larger. The theory error is analyzed,and the error surface is given. According to the error surface,the error can be known with the given NA and axial sampling distance,in the other hand,when the measurement precision is given,we can choose the NA and axial sampling distance. At last,the computer simulation is given. The result shows that the measurement with interpolation technique needs only 8 times sampling, while the measurement without interpolation technique needs 58 times to get approximate precision. The fast method is adapted to real-time 3D measurement, and the error analysis is useful in the design of confocal microscopy.
出处
《光子学报》
EI
CAS
CSCD
2000年第6期549-553,共5页
Acta Photonica Sinica
关键词
共焦显微术
三维测量
误差分析
计算机仿真
Confocal microscopy
3D measurement
Error analysis
Computer simulation