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共焦显微镜三维轮廓快速测量方法及其误差分析 被引量:8

THE FAST 3D PROFILE MEASUREMENT USING CONFOCAL MICROSCOPY AND ERROR ANALYSIS
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摘要 共焦显微术在生物学及工程应用中已成为一种有效的测量、观察方法.本文针对共 焦显微三维测量系统提出了一种高精度快速算法,并进行了误差分析与计算机仿真.对实际 共焦三维测量系统的设计具有重要意义. Confocal microscopy has been an important tool for measurement and inspection in the fields of biomedicine and engineering since its appearance. To get high measurement precision, high number aperture (NA) is often used. However,it's also mean the axial sampling distance is small,and many times sampling is needed to get the profile of object. In this paper,an interpolation technique is studied, and a fast method to get the 3D profile is inferred. With this method, high measurement precision can be gotten,while the axial sampling distance is larger. The theory error is analyzed,and the error surface is given. According to the error surface,the error can be known with the given NA and axial sampling distance,in the other hand,when the measurement precision is given,we can choose the NA and axial sampling distance. At last,the computer simulation is given. The result shows that the measurement with interpolation technique needs only 8 times sampling, while the measurement without interpolation technique needs 58 times to get approximate precision. The fast method is adapted to real-time 3D measurement, and the error analysis is useful in the design of confocal microscopy.
出处 《光子学报》 EI CAS CSCD 2000年第6期549-553,共5页 Acta Photonica Sinica
关键词 共焦显微术 三维测量 误差分析 计算机仿真 Confocal microscopy 3D measurement Error analysis Computer simulation
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参考文献2

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