摘要
用前向反冲方法和高能非Rutherford背散射方法研究了磁控溅射制备的Ti-Mo合金薄膜的氢化性能和碳、氧污染的影响。掺Mo的Ti合金薄膜不仅能大大减低碳的污染,而且较纯钛有较高的吸氢性能.合金氢化后由δ相氢化物和β相固溶体组成.随着Mo成分增加,合金中的β-(Ti,Mo)含量上升.当Mo含量(原子分数,%)约20时可形成单一的β相固溶体,此时氢含量(原子分数,%)仍可在45以上.Ti-Mo合金薄膜同时也具有良好的附着力和抗粉化性能。
Hydrogenation property of Ti-Mo alloy films and the influences of C and O con- tamination on hydrogen uptake were investigated by elastic recoil detection(ERD) and high-energy non-Rutherford backscattering methods.The results show that not only the C contamination in the alloys can be reduced greatly and also the considerable upgrade in hydrogenation capability has been obtained, as compared with pure Ti. On the other hand, there is only a little increase in their storage capability with increasing Mo concentration, and the phases in the samples hydrogenated at 473 K are composed of a δ-hydride and a β-solid solution. When the Mo content approached to 20(atomic fraction,%), only the δ-phase existed in the film and the hydrogen concentration is about 45 (atomic fraction,%), the durability of the sputtered films on Mo substrate against the hydrogen absorption desorption cycle was measured, which showed a significant improvement.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
2000年第5期530-534,共5页
Acta Metallurgica Sinica