紫外固化型聚合物高阶布拉格波导光栅滤波器

High-order Bragg waveguide grating filter based on ultraviolet curable polymer

利用紫外固化材料SU-8 2005与热交联聚合物甲基丙烯酸甲酯-甲基丙烯酸缩水甘油酯[P(MMA-GMA)]分别作为波导芯层和包层材料,通过直接光刻技术,成功实现了厚度为5μm,宽度为9μm,光栅高度为4μm的起伏型高阶布拉格波导光栅滤波器。对光栅器件的谐振波长,光透射率等重要参数进行了模拟设计。测得制备的聚合物高阶布拉格波导光栅滤波器的谐振波长为1 550.4 nm,消光比为23 dB,3-dB带宽为2 nm。

Ultraviolet curable material SU-8 2005 and thermal crosslinked polymer Methyl Methacrylatel Glyci- dyl Methacrylate[ P（MMA-GMA） ] are used as the core and the cladding layer materials, respectively, and a novel high-order Bragg waveguide grating filter with a thickness of 5 μm, a width of 9 μm and a grating height of 4 μm is successfully designed and fabricated by direct photolithography technique. The characteristic pa- rameters including resonance wavelength and transmissivity are carefully simulated. The performance parame- ters of fabricated device are measured to obtain the resonance wavelength of 1 550.4 nm, the extinction ratio of 23 dB and the 3-dB bandwidth of 2 nm.