基体材料对TiN薄膜表面液滴及薄膜结合力的影响

Effects of Different Substrates on the Droplets and Adhesion Strength of TiN Films

采用真空阴极电弧离子镀技术分别在4Cr5MoSiV1(H13)模具钢、Cr18Ni9Ti(304)不锈钢、YG6硬质合金、Ti6Al4V(TC4)钛合金4种基体表面沉积TiN薄膜。利用扫描电镜(SEM)对薄膜表面液滴进行观察分析,通过划痕仪对薄膜的膜/基结合力进行表征。结果表明:基体材料不同,TiN薄膜上液滴的密度、尺寸存在明显的区别。其中,镀膜后H13钢和304不锈钢表面的液滴数量最多,YG6硬质合金次之,TC4钛合金最少;薄膜的膜/基结合强度依次为YG6硬质合金>H13钢>304不锈钢>TC4钛合金。

TiN films were deposited on 4Cr5MoSiV1（H13） die steel,Cr18Ni9Ti（304） stainless steel,YG6 cemented carbide and Ti6Al4V （TC4） titanium alloy substrates, respectively, by vacuum cathodic arc ion plating. Droplets on TiN films were observed and analysed by scanning electron microscopy （SEM） and the adhesion strength of the coating was characterized by scratching tester. The results show that droplets densities and sizes on the film surfaces have evident difference among the four different substrates. From the statistical analysis of the experimental results, the number of droplets on H13 steel and 304 stainless steel are much more than that on YG6 cemented carbide and TC4 titanium, and the droplets densities on TC4 titanium is the least. Adhesion strength of the films on the four substrates are also different. From the highest to the lowest, the adhesion strength of films on different substrates are, in order, YG6 cemented carbide, H13 steel, 304 stainless steel and TC4 titanium.