参数设定对原子力显微镜测试的影响

The effects of different parameters on atomic force microscope

研究了不同的测试模式、线扫描点、扫描速率、积分增益和振幅设置对原子力显微镜测试的影响,比较了在不同的测定参数下样品的成像质量、槽深和粗糙度。结果表明,随着线扫描点的增加和扫描速率的降低,成像所需的扫描时间也随之增加,但扫描点越多,图像越精细。积分增益越大,系统响应的越快,但系统的噪音也会随之增加。振幅设置对软样品的影响比对硬样品的大。结合实际操作,还简单介绍了一些原子力显微镜测试的经验。

This paper was performed to investigate the effects of testing mode, samples/line, scan rate, integral gain and amplitude setpoint on atomic force microscope. Under the different parameters, the differences of image quality, depth and roughness were compared. The results showed that the required time of scanning imaging were increased with the increase of samples/ line and the decrease of scan rate. The more samples/lines, the higher quality of imaging. The increase of feedbacks and noises of system were also observed with the increase of integral gain. The effects of amplitude setpoint were more pronounced on the soft samples than on the hard ones. Combined with the practical operation, this paper also simply described some measurement experiences of atomic force microscope.