摘要
夏克-哈特曼波前传感器因其可以同时测量激光的强度及相位信息,已广泛用于激光光束质量检测中。根据实际检测的要求,设计夏克-哈特曼传感器系统的参数是构建检测系统的重要一环。综合考虑了夏克-哈特曼传感器的动态范围、灵敏度和精度等要求及其相互制约问题,进行了夏克-哈特曼传感器的参数设计。说明了具体的指标设计过程,并根据设计指标,研制了激光光束检测系统。系统实际达到的单孔径的动态范围为3.7λ(λ=632.8nm),灵敏度为0.01λ,菲涅耳数为2.468,符合激光光束检测系统的要求。
Shack-Hartmann wave-front sensor has been widely used in laser-beam quality measurement, for its acquisition of intensity and phase of laser beam simultaneously. It is an important procedure in the construction of the measurement system to design the system parameters of the Shack-Hartmann wave-front sensor according to the requirements in actual laser beam test. The parameters of the Shack-Hartmann wave-front sensor are designed with considerations of the requirements of the precision, sensitivity and dynamic range, as well as the mutual restraints among them. The design procedure is given and the laser-beam measurement system is constructed successfully with the designed parameters. The actual Shack-Hartmann wave-front sensor in single aperture with dynamic range of 3.7λ （λ=632.8 nm）, sensitivity of 0. 01λ, and Fresnel number of 2. 468, satisfies the requirements of the laser- beam measurements in practice.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2013年第3期295-299,共5页
Acta Optica Sinica
