摘要
以像点位移的概念阐述了光学投影式轮廓测量法的原理和关键任务 ,详细分析了从相位到像点位移和从像点位移到高度的两项不可忽略的误差源 ,并给出了误差补偿方法。
A new conceptimage point displacement (IPD) is presented, on which the principles and key tasks in light pattern projection profilometry are re interpreted and evaluated. Two non negligible error sources from phase to IPD and from IPD to height are analyzed in detail. Some compensation approaches are proposed and verified by numerical simulation and experiments.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2000年第3期376-379,共4页
Acta Optica Sinica
关键词
光栅投影
轮廓测量
像点位移
grating projection, profilometry, image point displacement.