太赫兹MEMS滤波器性能影响因素

Influencing factors on performance of terahertz MEMS filter

在太赫兹微电子机械系统(MEMS)滤波器的制作中,每一步工艺造成的误差都会对滤波器的性能造成影响,使滤波器达不到设计要求。为能够制作出满足指标的滤波器,对影响滤波器性能的尺寸、参数进行分析,且对这些参数进行仿真找到影响的规律;结合参数仿真与滤波器的测量进行整体分析,提出有效的解决方案,提高了太赫兹MEMS滤波器的成品率和性能参数。

In the production of terahertz Micro-Electro-Mechanical Systems（MEMS） filter, every error caused by the process could affect the performance of the filter, and its index will not meet the design requirements. In order to make the qualified filter, this paper analyzes the size and parameters which could affect the performance of the filter, seeks the relation between parameters and performance, finally contrasts and analyzes the simulation and measurement aiming to propose the solutions. The yield and performance parameters of terahertz MEMS filter have been improved.