摘要
采用射频磁控溅射法在蓝宝石基片上制备了Bi1.5Zn1.0Nb1.5O7(BZN)/Ba0.5Sr0.5TiO3(BST)双层复合薄膜,并研究了该薄膜在100 kHz^6 GHz频率范围内的介电性能。研究结果表明,BZN/BST复合薄膜的介电性能具有良好的频率稳定性。该复合薄膜的介电常数在研究的频率范围内基本与频率无关;其介电损耗在频率低于1 GHz时与频率无关,在频率高于1 GHz时随频率的上升而略微增大;薄膜在研究的频率范围内具有稳定的介电调谐率。
Bi1.5 Zn1.0 Nb1.5 O7 （BZN）/Ba0.5 Sr0.5 TiO3 （BST） bilayered thin films were prepared on sapphire substrates by conducting a radio frequency magnetron sputtering, and the dielectric properties of these prepared films were investigated in the frequency range between 100 kHz and 6 GHz. The results indicate that the dielectric properties of BZN/BST bilayered thin films possess good frequency stability. The permittivity of these films is almost frequency independence. The dielectric loss of these films is frequency independence at the frequencies below 1 GHz, and it slightly increases as the frequency increases at the frequencies above I GHz. The dielectric tunability of these films is frequency independence.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2013年第6期26-30,共5页
Electronic Components And Materials
基金
国家自然科学基金资助项目(No.50972024
No.60871049)
关键词
频率特性
介电调谐
介电损耗
介电常数
铌酸锌铋(BZN)
钛酸锶钡(BST)
frequency response
dielectric tunability
dielectric loss
permittivity
bismuth zinc niobate （BZN）
barium strontium titanate （BST）
