光栅调制深度和深度误差对衍射效率影响的理论分析

The Theoretical Analysis of Influence of Modulation Depth and Depth Error on Grating Diffraction Efficiency

本文通过对三种典型衍射光栅的透过率函数进行傅里叶级数展开 ,系统地计算并分析了其衍射 效率 ,并得到了衍射效率的光谱响应和制作误差容限 。

Diffraction efficiencies of three typical gratings have been calculated and analysed systematically by expressing the transmissivity function of the gratings using Fourier series.The spectral response and the tolerance of fabrication errors have been presented.Therefore,the theory can obtain for optimized design of gratings for different desire.