摘要
该文通过分析外延层外延电阻率变化,场注入偏浓和埋层上浮三个IC制品生产线最常见的典型案例,比较明确三者之间的异同,了解和认识PCM相关参数的变化情况。同时也记录不同失效类型,并予以归类。
Based on the analysis of three typical failure cases in IC manufacturing line,which including epi- taxial resistance variation.,excessive filed ion-immission and the floating N＋B.Through comparing the simi- larities and differences between them,we can understand and grasp the changes of PCM parameters quickly.It＇s also convenient for sorting out and calssifying different failure modes.
出处
《电子质量》
2013年第6期17-24,共8页
Electronics Quality
关键词
外延电阻
埋层上浮
场注入
epitaxial resistance
floating N＋B
filed ion immission
