摘要
为了验证相位恢复波前传感器的性能,搭建了相位恢复传感器和Zygo干涉仪对不同波前畸变进行比较测量的实验平台。采用液晶空间光调制器产生的单项像差来验证相位恢复传感器对各种像差的检测能力,把相位恢复测量结果与高精度的Zygo干涉仪测量结果进行比较分析,结果表明在面形误差分布及误差的峰谷(PV)值和均方根(RMS)值上,两者具有一致性,对于波前RMS的测量精度达到3λ/1000左右,这说明相位恢复测量方法的可行性和准确性。
In order to validate the performance of phase retrieval wavefront sensor （PRWS）, an experimental setup based on the PRWS method comparing with Zygo interferometer is built. The liquid crystal spatial light modulator （LC-SLM） is utilized to produce single aberration and random aberration, and the ability of PRWS measurement for any aberration is validated. The experimental results demonstrate that agreement is obtained among the errors distribution, peak valley （PV） value and root mean square （RMS） value of Zygo interferometer. The measurement precision of wavefront is 3λ/1000 （RMS）. Therefore, the feasibility and accuracy of the proposed method can be confirmed.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2013年第10期250-257,共8页
Acta Optica Sinica
基金
国家863计划(2011AA8082035)
关键词
测量
相位恢复
波前传感器
液晶空间光调制器
Zygo干涉仪
像差
measurement
phase retrieval
wavefront sensor
liquid crystal spatial light modulator
Zygo interferometer
aberration
