摘要
研制了反射式光电编码器。介绍了光栅自成像原理,完善了高密度基准光栅的制作工艺,研制完成了32768刻线对光栅和高集成度光电读数头,最后制成了反射式高精度光电编码器。该编码器采用多参考点编码方式,加快和简化了确定基准零点的操作,初始化转动最大5.625°即可确定基准零点。采用自准直光管和23面棱体检测了编码器的测角精度,其单边读数头均方根误差为1.11″,对径双读数头均方根误差为0.75″;反射式读数使光栅与读数头间隙提高10倍达到2.0mm。结果表明,研制成功的高精度反射式光电编码器结构简单,反射式读数头光电信号质量较高。该编码器为高精度测角应用提供了一种新的解决方案。
A reflective photoelectric encoder was developed.The grating self-imaging principle was introduced,the production process of a high-density reference grating was improved and a 32768 line grating and a highly integrated optical reading head were prepared.Then,the high-precision reflective optical encoder was completed.By using multi reference points,the encoder could confirm the absolute position easyly and quickly,and its standard zero point was determined by the most initialize rotate angle of 5.625°.The angle measuring accuracy of the encoder was measured by a self collimating light tube and a 23 surface prism.The measuring results indicate that the Mean Square Root Error for single reading head is 1.11″ and that for double reading head is 0.75″.The gap between reflection grating and reading head is about 2.0 mm,which is ten times larger than that of tradition type encoders.The results demonstrate that the high-precision reflective optical encoder developed has simple structures and its reading head shows high quality photoelectric signals.It can provide a solution scheme for high precision angle measurement.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2013年第12期3066-3071,共6页
Optics and Precision Engineering
基金
中国科学院知识创新工程领域前沿项目资助
关键词
高精度编码器
反射式编码器
光栅自成像
高密度基准光栅
high precision encoder
reflection encoder
grating self-imaging
high-density reference grating