摘要
通过研究激光散射法测量表面粗糙度、三角法测量微位移、干涉法测量表面微观轮廓三种几何量测量技术的共性 ,设计新型光路 ,将三种光电测量技术集成为一个测量仪 ,使其成为采用同一光源、基本同一光路、同一光敏接收器的新型光电精密测量仪器 ,而同时具有三种测量功能 .
Through the study of the surface roughness measurement by laser diffusion method,micro displacement measurement by optical triangle method and surface micro profile measurement by interference method, a new type of electro optical measuring instrument is designed. The three techniques are integrated into this instrument.It has the same light source,generally the same optical path and the same electro optical receiver and has the three functions simultaneously.
出处
《四川大学学报(工程科学版)》
EI
CAS
CSCD
2000年第6期78-81,共4页
Journal of Sichuan University (Engineering Science Edition)
基金
国家自然科学基金资助项目! (5 95 70 5 8)