硅加速度计系统设计技术

The System Design Technology of Silicon Accelerometer

介绍了力平衡式硅加速度计的设计 ,勾画了 MEMS产品的一般设计思路和方法 .微结构与电子线路这两个相互依存的设计部分的有效结合保证了整个系统的最终性能与特性 .因此 。

By introducing the design of the force balance silicon accelerometer,this paper describes the ideas and methods of the MEMS products. The effective links of the micro structure and the electronics which are interdependent ensures the final performance of the whole system. So it is the design rule of a hybrid system that considers in system and designs in double.