摘要
本文评述了国内外缩微技术的水平与现状,从原理、材料、设备等方面介绍了缩微技术的最新发展,探讨了缩微技术的发展趋势,并对今后的发展作了预测,最后还提出了我国开发与应用缩微技术的对策与建议。
This paper reviews the state and the present situation of micrographic technology at home and abroad, introduces its recent development from these aspeets. principle, materials and equipment. It discusses the development trends of microgra-phic technology, and forecasts its future development, finally, raises some countermeasures and suggestions for developing and using micrographic techology in onr country
出处
《情报科学》
CSSCI
北大核心
1991年第03X期59-65,共7页
Information Science
