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渗氮-气相沉积硬质膜复合处理技术及其发展 被引量:1

Technique and Development of Duplex Treatment of Nitriding and Vapor Deposition of Hard Films
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摘要 阐述了渗氮 -气相沉积硬质膜复合处理的设计思想。从渗氮 -气相沉积硬质膜复合处理工艺方法的选择、复合处理层组织结构、性能研究等方面介绍了渗氮 The principle is presented for designing duplex treatment of nitriding and vapor deposition of hard films. The development of the duplex treatment of nitriding and vapor deposition of hard films is introduced from the points of selecting duplex treatment processes, improving the microstructure and properties of the duplex-treated layer.
作者 谢飞
出处 《江苏石油化工学院学报》 2001年第4期38-41,共4页 Journal of Jiangsu Institute of Petrochemical Technology
基金 国家自然科学基金资助项目 (19392 30 0 - 5 )
关键词 渗氮 气相沉积 复合处理 硬质膜 表面处理 nitriding vapor deposition duplex treatment hard film
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