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直角坐标和极坐标系一体的激光直写设备(英文) 被引量:13

LASER DIRECT WRITING SYSTEM WITH CARTESIAN AND POLAR COORDINATE
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摘要 介绍了具有直角坐标和极坐标写入系统的激光直写设备 。 Laser Direct Writing System(LDWS),which is mainly composed of Cartesian and polar coordinate systems,is introduced here and its photolithographic characteristics for fabricating the diffractive optical elements (DOE′s) are presented.The fabrication techniques by applying the laser direct writing are developed.Experimental results have been obtained by using LDWS.
出处 《光子学报》 EI CAS CSCD 北大核心 2002年第5期616-619,共4页 Acta Photonica Sinica
基金 National Natural Science Foundation( 6 0 0 780 0 6 )
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参考文献12

  • 1[1]Gale M T,Rossi M,Pedersen jrn,et al.Fabrication of continuous-relief micro-optical elements by laser beam writing in photoresists.Opt Eng,1994,32(11):3556~3566
  • 2[2]Chan Yuen Chnen.Development and applications of laser writing lithography.Opt Eng,1998,37(9):2521~2530
  • 3[3]Langlois P,Jerominek H,Leclerc L et al.Diffractive optical elements fabricated by laser direct writing and other techniques.Proc SPLE,1992,1751:2~12
  • 4[4]Su Heng,Wang M R.Laser direct-write optical grating lenses and lenslet arrays on glass for optical interconnect applications.Proc SPLE,1996,2891:82~87
  • 5[5]Goltsos W,Liu Sharlene.Polar Coordinate laser writer for binary optics Fabrication.Proc SPLE.1990,1221:137~147
  • 6[6]Harurna M,Takahashi M,Wakahayashi K,et al.Laser beam lithographed micro-Fresnel lenses.Appl Opt,1990,29(34):5120~5126
  • 7[7]Bowen,J P,Michaels R L,Blough C G.Generation of large-diameter diffractive elements with laser pattern generation.Appl Opt,1997,36(34):8970~8975
  • 8[8]Wang M R,Su Heng.Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication.Appl opt,1998,37(32):7568~7576
  • 9[9]Yang Goguang,Sheng Yibing.Research on laser direct writing system and its lithography properties.Proc SPIE,1998,3550:409~418
  • 10[10]Cherkashin,V V,Kharissov A A,Korol,kov V P,et al.Accuracy potential of circular laser writing of DOE′s.Proc SPLE,1998,3348:58~68

同被引文献68

  • 1颜树华,戴一帆,吕海宝,李圣怡.二元光学器件激光直写技术的研究进展[J].半导体光电,2002,23(3):159-162. 被引量:7
  • 2侯德胜,杜春雷,邱传凯,白临波.ISI-2802激光直写系统及其应用[J].光电工程,1997,24(S1):27-31. 被引量:6
  • 3曾爱军,王向朝,徐德衍.投影光刻机调焦调平传感技术的研究进展[J].激光与光电子学进展,2004,41(7):24-30. 被引量:19
  • 4普里亚耶夫 杨力(译).光学非球面检验[M].北京:科学出版社,1982..
  • 5YANG Guo-guang,SHEN Yi-bing. Research on laser direct writing system and its lithography properties [J]. SPIE,1998,3550: 409-418.
  • 6Burge J H.Applications of computer-generated holograms for interferometric measurement of large aspheric optics[J].Proc SPIE,1995,2576:258-269.
  • 7Burge J H,Anderson D S,Milster T D,et al.Measurement of a convex secondary mirror using a holographic test plat[J].Proc SPIE,1994,2199:193-198.
  • 8Burge J H,Anderson D S,Full aperture interferometeric test of convex secondary mirrors using holographic test plates[J].Proc SPIE,1994,2199:181-192.
  • 9Burge J H.Fizeau interferometery for large convex surface[J].Proc SPIE,1995,2536:127-137.
  • 10Burge J H.Measurement of large convex asurferes[J].Proc SPIE,1997,2871:362-373.

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