摘要
介绍了具有直角坐标和极坐标写入系统的激光直写设备 。
Laser Direct Writing System(LDWS),which is mainly composed of Cartesian and polar coordinate systems,is introduced here and its photolithographic characteristics for fabricating the diffractive optical elements (DOE′s) are presented.The fabrication techniques by applying the laser direct writing are developed.Experimental results have been obtained by using LDWS.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2002年第5期616-619,共4页
Acta Photonica Sinica
基金
National Natural Science Foundation( 6 0 0 780 0 6 )