摘要
波长误差是激光干涉仪的重要误差源,而折射率的变化直接影响波长精度,本文介绍了激光折射率修正的原理,比较了间接、绝对、相对三种实用折射率修正方法的特点,分析了折射率修正的算法,进而提出一些正确使用激光干涉仪的方法。
Wavelength error is one of the important error sources of the laser interferometer. The changes of the re- fractive index directly affect the wavelength accuracy. This paper introduces the basic principle of laser refractive index cor- rection, compares the characteristics of three practical wavelength - correction methods including the indirect method, the absolute method and the relative method. This paper also analyzes the refractive index correction schemes, and proposes some suggestions to use the laser interferometer better in the practical measurements.
出处
《工具技术》
北大核心
2015年第1期77-81,共5页
Tool Engineering