MEMS压电-磁电复合式振动能量采集器

MEMS Vibration Energy Harvester Based on the Piezoelectric and Magnetoelectric Effect

具有高能量输出密度的自我供电振动能量采集技术有着迫切的应用需求,是智能化MEMS器件系统发展的重要方向。研究了一种可将外界环境振动能转化为电能的MEMS压电-磁电复合振动能量采集器,其综合了压电发电和磁电发电的优势,为新型MEMS供电研究提供了新思路。利用溶胶-凝胶工艺完成锆钛酸铅(PZT)压电功能薄膜的制备,采用MEMS加工技术完成器件四悬臂梁-中心质量块基础结构的设计和制作,结合集成封装技术实现微结构与永磁铁的微组装。测试结果表明:在一阶谐振频率247 Hz,10 g加速度激励的振动状态下,器件压电部分压电敏感单元与磁电部分电感线圈的单位体积最大有效输出电压分别为2.066×107和5.002×106 mV/cm3。

The self-powered vibration energy harvesting technology with high output power density is urgently required,which is an important developing direction for the intelligent MEMS device system.The MEMS vibration energy harvester of piezoelectricity and magnetoelectricity for the transformation of the environment vibration energy into electric energy was integrated.The harvester combines the advantages of the piezoelectric and magnetoelectric generations,providing a new idea for the novel MEMS power supply investigation.The PZT piezoelectric functional thin film was accomplished by the sol-gel process.The foundation structure of the four-cantilever beam-center mass block for the MEMS vibration energy harvester was designed and fabricated by using the MEMS micromachining technology.The micro-structure and permanent magnet were assembled by the integrated packaging technology.The experimental results show that the maximum effective output peak-peak voltage of the device is excited under 10 gacceleration and first order resonant frequency of 247 Hz.It can generate the maximum effective output voltage per unit volume of 2.066×107 and 5.002×106 mV/cm3 for the piezoelectric sensing unit of the piezoelectric part and inductive coil of the magentoelectric part,respectively.