悬臂梁压电式振动发电机材料性能优化研究

Optimization Study on Cantilever Piezoelectric Vibration Generator Material Property

具有高能量密度的微型压电振动发电机可以无限、持续地为无线传感器网络提供能量。为了提高有限体积悬臂梁压电式振动发电机的发电能力,通过力学模型及有限元仿真分析了单晶片型式、双晶片并联型式和双晶片串联型式压电振动发电机的材料参数与输出电压及固有频率之间的关系。结果表明,在低频工作环境下,应优先选择PZT-4、PZT-5A、PZT-5H的压电材料和不锈钢、镍合金的基板材料。

Piezoelectric vibration generator made in MEMS can infinite and continue to supply energy for low power e-lectric device. For increasing generating capacity of cantilever piezoelectric vibration generator with limited volume, mechanical model accuracy is verified which apply ANSYS finite element,and influence rule of material parameter of cantilever piezoelectric generator to inherent frequency and output voltage are studied,and material parameter is opti-mized analysis aiming maximum output electric energy with minimum volume. The results indicate PZT-4,PZT-5A and PZT-5H piezoelectric materials and stainless steel,nickel alloy substrate material should be firstly chosen.