基底与微悬臂梁间接触-分离的动态分析

Dynamic Analysis of Contact-separation Between Substrate and Micro-cantilever

将基底与微悬臂梁间的接触简化为一理想平面基底与微悬臂梁粗糙面间的接触,在考虑微悬臂梁的弹性恢复、两接触体的弹塑性变形以及粗糙面微凸体间相互粘着作用的基础上,运用ABAQUS大型有限元软件实现了微悬臂梁与基底的接触-分离动态分析。结果表明,该撞击过程实际上是一个复杂的多次弹塑性撞击过程,一般存在2个以上的明显撞击区,每个撞击区包含了形式多样的复杂的次生撞击过程,并且每次撞击力较静态接触力大很多,因此造成的影响很大。其对今后的材料摩擦磨损具有一定的理论指导意义。

The contact between substrate and micro-cantilever is simplified as an ideal flat substrate contact with a micro-cantilever rough surface. In consideration of the micro-cantilever elastic recovery, plastic deformation of the contact body and adhesive interac- tion of asperities, micro-cantilever with the substrate contact-separation dynamic analysis is made by the use of finite element soft- ware ABAQUS. The results show that the impact process is actually a complex multiple elastic-plastic impact process, generally, there are two or more obviously impact areas, a variety of complex secondary impact processes exist in each impact area and the impact force is much bigger than static contact force, so the effect is very serious. It lays the foundation for further researching on the friction wear of the substance.