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3D封装与硅通孔(TSV)技术 被引量:1

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摘要 随着对芯片集成度以及对电性能要求越来越高,近些年来3D封装发展迅速。其中硅通孔技术(TSV)被认为是实现3D封装的最好选择之一。因此TSV工艺逐渐成为微电子领域的热门话题之一,并且促进着微电子行业进一步向前发展。本文分析了硅通孔技术的优点以及挑战,同时也简单介绍了硅通孔技术的应用。
作者 周健 周绍华
机构地区 合肥工业大学
出处 《中国新技术新产品》 2015年第24期13-13,共1页 New Technology & New Products of China
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