DBD高频高压放电电源的设计及其放电特性

Design of DBD High-frequency High-voltage Power Supply and Its Discharging Characteristics

为了研究补偿电感量、介质层厚度和气隙大小等参数对介质阻挡放电(dielectric barrier discharge,DBD)特性的影响,采用Buck直流电源与逆变方波电源串联结构作为主电路,设计了一种DBD高频高压放电电源,该电源的输出电压和逆变开关工作频率单独可调。以单层和双层聚四氟乙烯平行板电极结构作为等离子体发生器进行了DBD高频高压放电实验,重点分析了补偿电感量、介质层厚度和气隙大小等参数对DBD放电负载回路谐振频率和DBD放电效果的影响。实验结果表明:改变补偿电感量,可以调节DBD放电负载回路的谐振频率;增大介质层厚度和气隙,介质电容和气隙电容减小,负载回路的谐振频率增大,放电效果减弱。

In order to study the effects of some parameters, such as the compensating inductance, the thickness of the dielectric layers and the size of the air gap, on the characteristics of dielectric barrier discharge, using DC power supply in series with a square wave inverter as the main circuit topology,we designed a DBD high-frequency high-voltage power supply, in which the output power and frequency of the power supply could be regulated separately. DBD discharge experiments were conducted by using single-deck and double-deck Teflon as the plasma generator. Moreover, the influences of key parameters, such as compensating inductance, dielectric layer thickness, and gap size, on the resonant frequency of discharge load circuit and discharging effect were analyzed emphatically. The results show that the resonant frequency of discharge load circuit can be regulated by changing the compensating inductance, and with the dielectric layer thickness and gap size increasing, the capacitance of the dielectric capacitor and gas capacitor decreases, the resonant frequency of discharge load circuit increases, and the discharging effect weakens.