氮气流量对TiN薄膜组织结构及力学性能的影响

Effect of nitrogen flow on microstructure and mechanical properties of TiN films

采用磁控溅射方法在不锈钢表面沉积Ti N薄膜,通过扫描电子显微镜、显微硬度计、CSPM5500扫描探针显微镜、X射线衍射仪、往复式摩擦磨损仪等分析测试手段,研究氮气流量对薄膜形貌、成分、结构、硬度、表面粗糙度、耐磨损等性能的影响.结果表明,随着氮气流量的增加,薄膜的显微硬度、膜厚都逐渐降低,膜基结合力逐渐增加,膜基结合力在16 m L/min时达到最大67.2 N;表面粗糙度和平均摩擦系数均在8 m L/min时最低.随着氮气流量增加,薄膜主要生长取向由(200)晶面转向(111)晶面生长;Ti N薄膜的颜色也随氮气流量增大而加深,8 m L/min和12 m L/min时为金黄色,4 m L/min和16 m L/min时颜色较差.

TiN films were deposited on stainless steel using magnetron sputtering. The effects of nitrogen flow on morphology, composition, structure, microhardness, surface roughness, wear resistance of TiN films were investigated by SEM, microhardness instrument, CSPM5500 scanning probe microscope, XRD, reciprocating friction and wear tester. The results show that with the increasing of the nitrogen flow, the micro-hardness and thickness of the films tend to decrease while bonding strength in an increasing trend. The maximum adhesion substrate is 67.2 N when the value of nitrogen flux is 16 mL/min. Surface roughness and average friction coefficient are the lowest at 8 sccm. With the increasing of nitrogen flow rate, the main growth orientation of the film is transformed from （200） to （111）. The color of films become deeper with the increase of the nitrogen flow and the color is golden at 8 mL/min and 12 mL/min, 4 mL/min and 16 mL/min is bad.