一种兆赫频超声抛光振子的设计与研究

Research and Design of a High Frequency Megasonic Piezoelectric Polishing Vibrator

在声波透射与折射基本理论的基础上,设计制作了匹配层压电换能器结构的兆声抛光振子,提高了兆赫频超声抛光工具的声能量辐射效率。此外,通过对兆声压电振子的振动模式进行控制,消除了高频圆片型压电振子本身存在的强烈的耦合振动效应。在制作完成兆声抛光振子的基础上,对抛光振子工作端的振动振幅进行了测试,在横向尺度上满足了兆声抛光工具头振动振幅均匀化的要求。实现了一种用于硅片化学机械抛光的兆声抛光振子。为大尺寸硅片的化学机械抛光工艺提供了可借鉴的附加技术手段。

Based on the theory of propagation of avo^tic wave, a high energy radiation efficiency megasonic polishing vibrator is designed and produced, In addition, aiming to obtain uniform vibration amplitude of the megasonic polishing tools, Vibration mode of the piezoelectric vibrator is controlled, the strong coupling vibration of piezoelectric vibrator is eliminated. Then, design and machining experiments needed polishing megosonie vibrator. The vibration amplitude of polishing tool is measured and proved to be uniform. This technology provides reference for chemical mechanical polishing of large size silicon wafer.