大量程光纤准白光干涉绝对测距技术

Quasi-white Light Optical Fiber Interferometer for Large Range Absolute Distance Measurement

提出了一种新型光纤准白光干涉测距系统,系统由定位干涉仪和扫描干涉仪两部分组成,将目标的定位过程和测量过程分开,可实现绝对距离测量。同时,在定位干涉仪中加入光开关和多组已精确标定、具有不同光程差的光纤组,完成两级多次量程倍增,使得系统可只利用短扫描导轨(如200mm)进行大量程(10m以上)、高精度(相对精度可达10^(-5)量级)的绝对测距。

A novel quasi-white light optical fiber interferometer for absolute distance measurement is puts forward. The system consists of locating interferometer and scanning interferometer, therefore, the location of objects and the measurement process are divided and absolute measurement can be achieved. Moreever, the locating interferometer adopts light switch and several accurately calibrated fiber groups of different optical retardation to realize the two-level multiplication of measurement range. Experiments have shown that the system can fulfill large range absolute measurement of more than 10 m only using short scanning guide of 200 mm with a high relative accuracy of 10^(-5).