集成线性渐变滤光片和InGaAs焦平面的微型光谱模组及其波长定标（英文）

Integrated Linear Variable Filter/InGaAs Focal Plane Array Spectral Micro-module and Its Wavelength Calibration

提出一种集成线性渐变滤光片和InGaAs焦平面的微型近红外光谱模组.作为核心分光元件,线性渐变滤光片被紧密耦合在光敏芯片表面.相比于光栅分光方式,模组具有紧凑的光学结构和稳定的光学特性.对此光谱模组进行波长定标实验,并给出了标定准确性评价.实验结果表明,该光谱模组的波长范围为900~1 700nm,波长准确性优于1.3nm,光谱分辨率小于通道中心波长的1.25%.基于此光谱模组的波长定标方法准确、可行,可以被用于微型近红外仪等在线光谱分析领域.

An integrated spectral micro-module with a linear variable filter and an InGaAs focal plane array was proposed.As the core light dispersing element,the linear variable filter was coupled with an InGaAs detector array.Compared with the grating spectrometer,the micro-module has compact structure and stable optical properties.The wavelength calibration method and its accuracy were proposed and validated experimentally.The spectral range of the module is from about 900 nm to 1 700 nm.The calibration accuracy is better than 1.3 nm and the spectral resolution is no larger than 1.25% of peak wavelength.Experimental results demonstrate that the method of wavelength calibration is feasible and accurate.The spectral micro-module can be widely used in field or on-line applications.