硅压阻式压力传感器的高精度补偿算法及其实现

High Accurate Compensation Algorithm of Silicon Piezoresistive Pressure Sensor and Its Implementation

硅压阻式压力传感器广泛应用于汽车、医疗、航空航天、环保等领域。随着科学技术的发展,各领域对压力测量精度的要求越来越高。但由于半导体材料的固有特性,硅压阻式压力传感器普遍存在零点随温度漂移、灵敏度随温度变化和非线性等问题。为了提高硅压阻式压力传感器测量精度、降低输出误差,对该传感器的几种常用补偿算法进行了对比分析和研究,提出了一种基于最小二乘法的曲面拟合高精度补偿算法。该补偿算法能有效消除硅压阻式压力传感器零点漂移、灵敏度漂移和非线性误差,提高该传感器的输出精度。试验结果表明,在-40^+80℃温度范围内,硅压阻式压力传感器经该补偿算法计算后,测量精度得以大幅度提高,输出误差小于0.01%F·S。

Silicon piezoresistive pressure sensors are widely used in various fields of national economy,such as automotive,medical,aerospace,environmental protection,etc. With the development of science and technology,the requirements for pressure measurement accuracy are higher and higher in various fields. However,due to the inherent characteristics of semiconductor materials,silicon piezoresistive pressure sensors commonly exist with zero temperature drift,sensitivity changes with temperature and nonlinear problems. In order to improve the measurement accuracy of the sensors and reduce the output error,several common compensation algorithms are analyzed and compared,and the method of surface fitting high-precision compensation algorithm based on least-squares method is proposed. This compensation algorithm effectively eliminates sensor zero drift,sensitivity drift and nonlinear error,and improves sensor output accuracy. The experimental results show that the accuracy of the measurement is greatly improved and the output error of the sensor is less than 0. 01% F·S within the temperature range of-40 ~ ＋ 80 ℃ after calculation by this compensation algorithm.