摘要
衍射光学器件 DOE是基于衍射光学原理制成的微光学器件。采用类似于微电子加工手段的激光辅助制造技术——激光直写技术 ,可以制作具有高衍射效率的 DOE。激光直写系统的性能 ,比如光强控制、坐标定位以及自动对焦等 ,直接影响制成器件的衍射效率。
Diffractive optical element(DOE)is a diffractive optics based microoptical element.DOE with high diffractive efficiency can be fabricated by laser aided fabrication technology LDWS(laser direct writing system),similar to the way manufacturing micro electronics.The performance of LDWS,such as intensity control,coordinates orientation and auto focusing,directly affects the diffractive efficiency of fabricated element.Last analyse the key technology fabricating curve surface DOE by laser aided fabrication.
出处
《光学仪器》
2002年第4期86-90,共5页
Optical Instruments