基于叉指状电容结构的微纳力测量装置

Micro-Nano Force Measurement Device Based on Interdigital Capacitor Structure

基于叉指状电容结构,设计一种微纳力测量装置。利用叉指状电容结构之间产生的微纳量级静电力,实现对微纳力的准确测量。装置结构简单、操作方便,同时可测量不同方向的微纳力。通过理论计算、数值模拟及实验结果的分析表明:在100 V～600 V的加载电压区间内,装置能达到较高测量准确度;当加载电压超过600 V时,由于加载电压自身不确定度增大,导致测量结果误差增大。研究结果对微纳力测量装置的小型化、集成化具有较大实用价值。

Based on interdigital capacitor structure,a micro-nano force measurement device has been designed.The accurate measurement of micro-nano force values was achieved by using the micro and nano scale electrostatic forces generated between interdigitated capacitor structures.This micro-nano force measurement device has the merits such as simple structure,convenient operation,and can measure micro or nano force values in different directions.The analysis results show that the device can obtain higher measurement accuracy in the loading voltage range of 100 V-600 V;When the load voltage exceeds 600 V,the error of measurement result increases due to the increase of the load voltage uncertainty.It has practical value for miniaturization and integration of micro-nano force measurement devices.