基于微孔抽丝成型工艺的软体力/位传感器

Software Force and Displacement Sensor Based on Microporous WireDrawing Molding Method

提出一种全柔性力/位传感器的设计、建模和制造方法,并进行试验验证。该传感器可通过附着在待测物表面或嵌入其内部进行力位混合的测量。首先,创新性地将提出的微孔抽丝成型工艺引入到软体结构的制造中,构建出低成本、易实现的软体微通道成型工艺体系,通过试验比对,验证了该工艺在软体微通道成型中的优势,成功实现了全柔性传感器高性能快速制造。其次,基于该成型方法设计了双层斜置并行多条的微通道传感器结构,有效地提高了灵敏度及线性度。最后通过试验对该传感器的性能进行验证。试验表明该传感器伸长率在14%以内时,作为全柔性力传感器线性误差小于5%,灵敏度为16.95m V/N;作为全柔性位移传感器线性误差小于2%,灵敏度为5.56mV/mm。研究内容为全柔性传感器在实际应用中的结构设计和成型方法中有很大的参考价值。

A fully flexible force position sensor’s design,modeling and manufacturing method are introduced in this article,and theexperimental verification is carried out.The sensor can be used to measure the force or displacement by attaching to the surface of theobject or embedding it inside.First of all,the wire drawing molding method of micro manufacturing is introduced into the structure ofthe software innovatively,construction of low cost,easy to realize the software of micro channel forming process system,verify theadvantages of the process in the forming of the micro channel software by comparison,the high performance and rapid manufacturingof the full flexible sensor has been achieved successfully.Secondly,based on the method,a double layer parallel multi strip microchannel sensor structure is designed,which effectively improves the sensitivity and linearity.The performance of the sensor has beenverified through experiments.When the elongation is less than 14%,as a full flexible force sensor,the linear error is less than 5%,andthe sensitivity is 16.95 m V/N.As a full flexible displacement sensor,the linear error is less than 2%,and the sensitivity is 5.56 m V/mm.The research content has great reference value for the structure design and forming method of the full flexible sensor inpractical application.