硅微谐振式加速度计温漂补偿研究

Study on temperature drift compensation on siliconmicro resonant accelerometer

硅微谐振式加速度计的输出信号是由谐振频率反映的,谐振频率的特性决定了仪表的精度。但加速度计的谐振频率具有温敏特性,当温度变化时,便会产生测量误差。为了减小这一影响,结合加速度计的外围控制系统,在分析加速度计谐振频率、控制电压随温度变化规律的基础上,设计加速度计零偏的补偿方法。利用数据拟合,建立加速度计谐振偏移频率与控制电压的模型,基于模型完成加速度计零偏的温度补偿工作。针对该方法的有效性,进行了全温实验验证,结果表明:应用该补偿方法,在-20~30℃之间,相较于补偿前的加速度计零偏漂移减小了66.7%。

Output signal of silicon micro-resonant accelerometer is reflected by resonant frequency,which determines precision of instrument.But resonant frequency of accelerometer has temperature-sensitive characteristic.When temperature changes,measurement error will occur.To reduce this influence,peripheral control system of the accelerometer is analyzed.On the basis of analyzing on law that the resonant frequency and control voltage of the accelerometer vary with temperature,the compensation method of zero bias for accelerometer is designed.The model for resonant offset frequency and control voltage of accelerometer is established by data fitting,and the temperature compensation of deviation of accelerometer is accomplished based on the model.Full-temperature experiments are carried out to verify the validity of this method.The results show that between the temperature range of-20~30℃,the zero bias drift of accelerometer is reduced by 66.7%compared with that of the accelerometer before compensation.