陶瓷尖劈内腔频率选择表面的制备及表征

Preparation and Characterization of the Frequency Selective Surface of the Ceramic Wedge Cavity

目前在陶瓷基材料频率选择表面的制备方法有很多,但在大长径比狭窄陶瓷深腔内壁制备金属涂层微细结构的工艺研究较少。基于导电银浆涂覆工艺和内表面激光加工技术,在石英纤维增强二氧化硅复合材料(SiO_(2)f/SiO_(2))尖劈内腔制备耐高温FSS结构,并对其进行性能表征。结果表明,金属涂层的厚度为12.08μm,常温和800℃的电导率为1.57×10^(7)S/m和1.496×10^(7)S/m,附着力达到0级,微细结构的尺寸精度为0.1932mm。

With FSS structure being prepared in the ceramic-based wedge cavity,a conductive silver paste coating process is adopted to prepare a uniform metal coating on the inner surface of the quartz fiber reinforced silica composite material(SiO_(2)f/SiO_(2))wedge,and then fine structure patterns on the metal coating are etched by performing the inner surface Laser processing technology and its performance is characterized.The results show that the thickness of the metal coating is 12.08μm,the conductivity at normal temperature and 800℃is 1.57×10^(7)S/m and 1.496×10^(7)S/m respectively,the adhesion reaches 0 level,and the dimensional accuracy of the microstructure is 0.1932 mm.This process can realize the preparation of a frequency selective surface on the inner wall of the wedge with a large aspect ratio,the subsequence can be applied to the preparation of the FSS structure of the inner surface of radome,antenna window and other products.